SYSTEM

OPKI / Integrated HV & UHV systems

Vacuum systems.
Built for your process.

We combine sample handling, vacuum chambers, process modules and control software into an architecture designed around your application.

OPKI UHV sample preparation platform: example of an integrated vacuum system
ILLUSTRATED EXAMPLE / UHV PREPARATION PLATFORM
Engineering vacuum continuity

Your application defines
the architecture.

Build a coherent path from sample introduction to processing, storage and transfer. Mechanical design, vacuum interfaces and control logic are considered together.

Start with the sample

Define the holder, handling constraints and preparation or analysis steps that the system must support.

Connect the process

Coordinate chambers, transfer mechanisms and instrument interfaces across the required vacuum workflow.

Specify the operation

Define manual functions, automation sequences, monitoring and operating rules for the intended use.

Example configuration / UHV sample preparation

Inside a preparation system.

This platform illustrates one system architecture OPKI can build. Its combination of modules is adapted to the sample, process and instrument interfaces of each project.

Example OPKI UHV preparation system with transfer rod and motorized positioning
Illustrative preparation platform from the OPKI portfolio. Module selection, dimensions, vacuum performance and process parameters are defined for the selected configuration.

Motorized sample transfer ↗

Move the sample between preparation, storage and analysis positions.

Three-axis positioning

Position the sample with a motorized manipulator.

Thermal annealing

Integrate controlled sample heating and automated annealing sequences.

Ion bombardment

Integrate an ion gun for surface cleaning and preparation before analysis.

In-vacuum storage ↗

Park samples under vacuum between process steps.

Vacuum transport ↗

Transfer samples to a compatible system using a vacuum suitcase.

From individual operations to a connected process

Design the sample’s journey.

An illustrative workflow brings the required handling and process steps into a coordinated operating sequence.

01

Introduce

Load samples through a dedicated introduction interface.

02

Transfer

Route samples between the selected process positions.

03

Prepare

Combine the preparation functions required by the application.

04

Store

Keep samples under vacuum between operations.

05

Transport

Connect the workflow to another compatible instrument.

OPKI ONESupported equipment control · Graphical recipes · Monitoring · Operating rulesExplore the software ↗

Workflow shown as an example. The order, process steps and available functions depend on the selected architecture and integrated devices.

Modular architecture / Application-specific integration

Configure the complete system.

Combine the functions your application needs, from a focused transfer arrangement to a multi-module preparation platform.

01 / SYSTEM LAYER

Sample handling

Transfer rods, positioning and storage configured around your sample format.

Explore the product range ↗

02 / SYSTEM LAYER

Vacuum environment

Chambers, load locks, pumping interfaces and pressure monitoring specified together.

Explore the product range ↗

03 / SYSTEM LAYER

Instrument interfaces

Docking and transfer connections defined for the instruments in your workflow.

Explore the product range ↗

04 / SYSTEM LAYER

Control & automation

OPKI ONE coordinates supported devices, operating rules, recipes and monitoring.

Discover OPKI ONE ↗

New architectures & existing installations

Connect your system
to one control environment.

OPKI ONE brings compatible OPKI and external equipment into a unified interface. Supported existing instruments can be incorporated following a review of each model, communication interface and required function.

OPKI ONE software for control and monitoring of integrated vacuum equipment
A system developed around your requirements

From your process to an integrated architecture.

01

Define the workflow

Sample format, preparation steps, vacuum conditions, interfaces and automation scope.

02

Design the architecture

Select modules and specify their mechanical, vacuum and control interfaces.

03

Integrate the system

Bring hardware, supported instruments and control functions together.

04

Validate operation

Review the agreed functions, sample-handling sequences and operating conditions.

Start your system project

What does your sample need to do?

Tell us about your process and existing instruments. We will help define the modules, interfaces and control scope for your application.

USEFUL STARTING POINTS / Sample & holder format · Vacuum requirements · Process steps · Instrument interfaces · Automation needs

Discuss your application ↗

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Hi, I’m VAKO.

Your guide to OPKI equipment.

What would you like to explore?

Find a product
Upgrade with OPKI ONE

OPKI ONE brings supported existing instruments and OPKI equipment together for control, graphical recipes and monitoring.

Have an older system? Tell the team its device models, current controls and what you would like to improve. Compatibility is reviewed for each configuration.

Explore an integrated system

Combine sample handling, vacuum chambers, preparation modules and control around your application. The preparation platform shows one example of an OPKI system.

Talk to the OPKI team